Patterning of silicone rubber for micro-electrode array fabrication

Proceedings of the 3rd International IEEE EMBS Conference on Neural Engineering

Volumn , Issue , 2007, Pages 53-56

  Schuettler, Martin ^a,b   Henle, Christian ^b   Ordonez, Juan ^a,b   Suaning, Gregg J ^a,c,e   Lovell, Nigel H ^a,d,e   Stieglitz, Thomas ^a,b  

^a IEEE

^b UNIVERSITY OF FREIBURG   (Germany)

^c UNIVERSITY OF NEWCASTLE   (Australia)

^d CSIRO   (Australia)

^e UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRY ETCHING; LASER ABLATION; MICROARRAYS; MICROELECTRODES; PARAMETER ESTIMATION; POLYDIMETHYLSILOXANE; SILICONES;

FEATURE SIZE (FS); PROCESS PARAMETERS;

RUBBER;

EID: 34548771191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CNE.2007.369610     Document Type: Conference Paper

References (7)

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