Metal gate electrodes: Theoretical studies of Zr/ZrO2 and Hf/HfO2 interfaces

Surface Science

Volumn 601, Issue 18, 2007, Pages 4138-4143

  Lucovsky, G ^a   Whitten, J L ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Ab initio molecular orbital theory; Electronegativity equalization; Metal oxide interfaces; Transition metal oxides

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRODES; ELECTRON TRANSPORT PROPERTIES; ELECTRONEGATIVITY; ELECTRONIC STRUCTURE; MOLECULAR ORBITALS; QUANTUM THEORY;

AB INITIO MOLECULAR ORBITAL THEORY; ELECTRONEGATIVITY EQUALIZATION; METAL OXIDE INTERFACES; TRANSITION METAL OXIDES;

ZIRCONIUM COMPOUNDS;

EID: 34548635483     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.04.057     Document Type: Article

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