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Volumn 42, Issue 1-6, 2007, Pages 392-397

Focused ion beam based sputtering yield measurements on ZnO and Mo thin films

Author keywords

FIB milling; Sputtering yield

Indexed keywords

COMMINUTION; ENERGY DISPERSIVE X RAY ANALYSIS; ION BEAMS; MOLYBDENUM; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING; ZINC OXIDE;

BEAM CURRENTS; ION BEAM SPUTTERING;

SOLAR CELLS;

EID: 34548509016 PISSN: 07496036 EISSN: 10963677 Source Type: Journal
DOI: 10.1016/j.spmi.2007.04.047 Document Type: Article

Times cited : (8)

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