Synthesis of diamond-like carbon films using a bi-modal sputter deposition with Xe ions

Surface Review and Letters

Volumn 14, Issue 4, 2007, Pages 735-738

  Rybachuk, Maksym ^a   Bell, John M ^a  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; FILM GROWTH; GRAPHITE; ION SOURCES; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); XENON;

BI-MODAL SPUTTER DEPOSITION; CARBON TARGET; GRAZING ANGLES; INCIDENT BEAMS;

DIAMOND LIKE CARBON FILMS;

EID: 34548451604     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X07010081     Document Type: Conference Paper

References (8)

1. N. Savvides and B. Window, J. Vacuum Sci. Tech. A 3 (1985) 2386-2390.
2. J. Bell, Z. Chen and A. Olofinjana, Diamond Relat. Mater. 10 (2001) 2184-2189.
3. J. F. Ziegler, www.srim.org (1984-2006).
4. A. C. Ferrari and J. Robertson, Phys. Rev. B: Condens. Matter Mater. Phys. 64 (2001) 075414.
5. M. Rybachuk and J. M. Bell, Diamond Relat. Mater. 15 (2006) 977-981.
6. P. Merel, M. Tabbal, M. Chaker, S. Moisa and J. Margot, Appl Surf. Sci. 136 (1998) 105-110.
7. R. Haerle, E. Riedo, A. Pasquarello and A. Baldereschi, Phys. Rev. B: Condens. Matter Mater. Phys. 65 (2002) 045101.
8. H. Heinisch, L. R. Greenwood, W. J. Weber and R. E. Williford, J. Nucl. Mater. 8 (2002) 307-311.