Equilibrium analysis of zirconium carbide CVD growth

Journal of Crystal Growth

Volumn 307, Issue 2, 2007, Pages 302-308

  Won, Yong Sun ^a   Varanasi, Venu G ^a   Kryliouk, Olga ^a   Anderson, Timothy J ^a   McElwee White, Lisa ^b   Perez, Rosa J ^c  

^a University of Florida   (United States)

^b Royal Institute of Technology ^*  (United States)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

A1. Phase equilibria; A3. Equilibrium analysis; A3. Metalorganic chemical vapor deposition; A3. Zirconium carbide

Indexed keywords

AEROSOLS; GROWTH (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHASE EQUILIBRIA; STOICHIOMETRY; THIN FILMS;

CHEMICAL EQUILIBRIUM; EQUILIBRIUM ANALYSIS; PHASE CONSTITUTION; ZIRCONIUM CARBIDE;

ZIRCONIUM COMPOUNDS;

EID: 34548415469     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.05.039     Document Type: Article

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