Small plasma source for materials application

Review of Scientific Instruments

Volumn 78, Issue 8, 2007, Pages

  Vizir, A ^a   Oks, E M ^a   Salvadori, M C ^b   Teixeira, F S ^b   Brown, I G ^c  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; PLASMA SOURCES; SURFACE TREATMENT; SYNTHESIS (CHEMICAL);

SMALL-SCALE MATERIALS; SOURCE CONSTRUCTION;

MATERIALS SCIENCE;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; GAS; HEATING; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; MICROFLUIDICS; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GASES; HEATING; MATERIALS TESTING; MICROFLUIDICS; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY;

EID: 34548385317     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2766837     Document Type: Article

References (5)

1. See, for instance, the Proceedings of the Biannual Symposia on Material Modification by Ion Beams (SMMIB) [published biannually in Surf. Coat. Technol.] and the Proceedings of the International Conferences on Ion Beam Modification of Materials (IBMM), [published biannually in Nucl. Instrum. Methods Phys. Res. A].
2. A. S. Metel', Sov. Phys. Tech. Phys. 29, 141 (1984).
3. N. V. Gavrilov and E. M. Oks, Nucl. Instrum. Methods Phys. Res. A 439, 31 (2000).
4. N. V. Gavrilov, G. A. Mesyats, G. V. Radkovski, and V. V. Bersenev, Surf. Coat. Technol. 96, 81 (1997).
5. W. D. Deininger, G. Aston, and L. C. Pless, Rev. Sci. Instrum. 58, 1053 (1987).