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Volumn 162, Issue 7-8, 2007, Pages 567-572

The computer simulation of energetic cluster-solid interactions

Author keywords

Cluster impacts; Ion beams; Molecular dynamics; Simulation

Indexed keywords

BIOMATERIALS; COMPUTER SIMULATION; DEPOSITION; ION BEAMS; MOLECULAR INTERACTIONS; MOLECULAR MODELING; SURFACE PROPERTIES; THIN FILMS;

EID: 34548348654     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/10420150701564936     Document Type: Conference Paper
Times cited : (11)

References (14)
  • 13
    • 34548346741 scopus 로고    scopus 로고
    • J. Hautala, J. Borland, M. Tabat et al., Proceedings of the IWJT-2004, Shanghai, China, March (2004), p. 50.
    • J. Hautala, J. Borland, M. Tabat et al., Proceedings of the IWJT-2004, Shanghai, China, March (2004), p. 50.
  • 14
    • 34548353814 scopus 로고    scopus 로고
    • W. Skinner, M. Gwinn, J. Hautala et al., Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Procedings, 2006), 214-218.
    • W. Skinner, M. Gwinn, J. Hautala et al., Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Procedings, 2006), 214-218.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.