Development of inertia driven micro robot with nano tilting stage for SEM operation

Microsystem Technologies

Volumn 13, Issue 8-10, 2007, Pages 1347-1352

  Nomura, Yoshihiro ^a   Aoyama, Hisayuki ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; CONVEYORS; MICROMANIPULATORS; SCANNING ELECTRON MICROSCOPY; SCREWS; SHRINKAGE;

ACCURATE ANGLE CONTROL; ECCENTRIC ACCELERATION; MICRO ROBOTS; PIEZO ELEMENTS;

ROBOTS;

EID: 34548284855     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0360-3     Document Type: Conference Paper

References (6)

1. Fuchiwaki O, Aoyama H (2002a) Piezo based micro robots for microscope instrument. In: Proceedings of the 6th international conference on mechatronics technology, pp 499-504
2. Fuchiwaki O, Aoyama H (2002b) Micro manipulation system by miniature robots in SEM vacuum chamber. J Robot Mechatron 14(3):221-226
3. Fuchiwaki O, Misaki D, Aoyama H (2003) Flexible microprocessing organized by versatile microrobots. In: Proceedings of the 7th international conference on mechatronics technology, pp 121-126
4. Furutani K, Higuchi T, Yamagata Y, Mohri N (1998) Effect of lubrication on impact drive mechanism. Prec Eng 22(2):78-86
5. Higuchi T, Yamagata Y (1992) Precise positioning utilizing rapid deformation of piezoelectoric elements (2nd report)-motion characteristics with enhanced friction (in Japanese). Jpn Soc Prec Eng 58(10):1759-1764
6. Higuchi T, Watanabe M, Kudou K (1988) Precise positioner utilizing rapid deformation of piezoelectoric elements (in Japanese). Jpn Soc Prec Eng 54(11):2107-2112