Molecular dynamics simulations of 30 and 2 keV Ga in Si

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 5, 2007, Pages 1417-1419

  Giannuzzi, Lucille A ^a   Garrison, Barbara J ^b  

^a Thermo Fisher Scientific   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOMS; COMPUTER SIMULATION; FOCUSED ION BEAMS; ION BOMBARDMENT; MOLECULAR DYNAMICS; SPUTTERING;

ATOMICALLY FLAT SURFACES; ION REFLECTION; MOLECULAR DYNAMICS SIMULATIONS;

SEMICONDUCTING SILICON;

EID: 34548267081     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2756541     Document Type: Article

References (7)

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5. B. J. Garrison, in ToF-SIMS: Surface Analysis by Mass Spectrometry, edited by, J. C. Vickerman, and, David Briggs, (Surface Spectra, Manchester, 2001), pp. 223-257.
6. J. Tersoff, Phys. Rev. B 39, 5566 (1989).
7. K. D. Krantzman, D. B. Kingsbury, and B. J. Garrison, Appl. Surf. Sci. 252, 6463 (2006).