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Volumn 1, Issue , 2004, Pages 491-494
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A thermally driven tunable TFBAR bandpass filter
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC WAVES;
ALUMINUM NITRIDE;
BANDWIDTH;
CMOS INTEGRATED CIRCUITS;
MICROMACHINING;
RESONATORS;
THIN FILMS;
DIELECTRIC RESONATOR FILTERS;
FREQUENCY TUNABILITY;
MULTIBAND SYSTEMS;
SYSTEM-ON-A-CHIP (SOC);
BANDPASS FILTERS;
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EID: 14744303522
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (5)
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