메뉴 건너뛰기




Volumn , Issue , 2007, Pages 866-871

Chip-scale localized synthesis of carbon nanotubes on copper microstructures via inductive heating

Author keywords

Carbon nanotubes; Chip scale; Copper microstructures; Induction heating; Rapid heating; Rapid synthesis

Indexed keywords

CHIP SCALE PACKAGES; ELECTRODEPOSITION; INDUCTION HEATING; MICROSTRUCTURE;

EID: 34548190072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352155     Document Type: Conference Paper
Times cited : (2)

References (18)
  • 3
    • 0035126240 scopus 로고    scopus 로고
    • Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport
    • M. H. Huang, Y. Wu, H. Feick, N. Tran, E. Weber, and P. Yang, "Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport," Advanced Materials, vol. 13, pp. 113-116, 2001.
    • (2001) Advanced Materials , vol.13 , pp. 113-116
    • Huang, M.H.1    Wu, Y.2    Feick, H.3    Tran, N.4    Weber, E.5    Yang, P.6
  • 5
    • 17944378392 scopus 로고    scopus 로고
    • Self-Aligned Carbon Nanotube Transistors with Charge Transfer Doping
    • J. Chen, C. Klinke, A. Afzali, and P. Avouris, "Self-Aligned Carbon Nanotube Transistors with Charge Transfer Doping," Applied Physics Letters, vol. 86, 2005.
    • (2005) Applied Physics Letters , vol.86
    • Chen, J.1    Klinke, C.2    Afzali, A.3    Avouris, P.4
  • 6
    • 27144483843 scopus 로고    scopus 로고
    • MEMS Sensor Material Based on Polypyrrole-Carbon Nanotube Nanocomposite: Film Deposition and Characterization
    • K.-S. Teh and L. Lin, "MEMS Sensor Material Based on Polypyrrole-Carbon Nanotube Nanocomposite: Film Deposition and Characterization," Journal of Micromechanics and Microengineering, vol. 15, pp. 2019-2027, 2005.
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , pp. 2019-2027
    • Teh, K.-S.1    Lin, L.2
  • 10
    • 0032491482 scopus 로고    scopus 로고
    • Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass
    • Z. F. Ren, Z. P. Huang, J. W. Xu, J. H. Wang, P. Bush, M. P. Siegal, and P. N. Provendo, "Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass," Science, vol. 282, pp. 1105-1107, 1998.
    • (1998) Science , vol.282 , pp. 1105-1107
    • Ren, Z.F.1    Huang, Z.P.2    Xu, J.W.3    Wang, J.H.4    Bush, P.5    Siegal, M.P.6    Provendo, P.N.7
  • 12
    • 0038444573 scopus 로고    scopus 로고
    • Local Synthesis of Silicon Nanowires and Carbon Nanotubes on Microbridges
    • O. Englander, D. Christensen, and L. Lin, "Local Synthesis of Silicon Nanowires and Carbon Nanotubes on Microbridges," Applied Physics Letters, vol. 82, pp. 4797-4799, 2003.
    • (2003) Applied Physics Letters , vol.82 , pp. 4797-4799
    • Englander, O.1    Christensen, D.2    Lin, L.3
  • 13
    • 33750170552 scopus 로고    scopus 로고
    • Formation and Characterization of Silicon/Carbon Nanotube/Silicon Heterojunctions by Localized Synthesis and Assembly
    • 163510
    • T. Kawano, D. Christiansen, S. Chen, C. Y. Cho, and L. Lin, "Formation and Characterization of Silicon/Carbon Nanotube/Silicon Heterojunctions by Localized Synthesis and Assembly," Applied Physics Letters, vol. 163510, 2006.
    • (2006) Applied Physics Letters
    • Kawano, T.1    Christiansen, D.2    Chen, S.3    Cho, C.Y.4    Lin, L.5
  • 14
    • 33750927577 scopus 로고    scopus 로고
    • Rapid Synthesis of Carbon Nanotubes via Inductive Heating
    • 193112
    • B. D. Sosnowchik and L. Lin, "Rapid Synthesis of Carbon Nanotubes via Inductive Heating," Applied Physics Letters, vol. 193112, 2006.
    • (2006) Applied Physics Letters
    • Sosnowchik, B.D.1    Lin, L.2
  • 16
    • 31544458686 scopus 로고    scopus 로고
    • Carbon Nanotube Growth Technologies Using Tantalum Barrier Layer for Future ULSIs with Cu/Low-k Interconnect Processes
    • M. Horibe, M. Nihei, D. Kondo, A. Kawabata, and Y. Awano, "Carbon Nanotube Growth Technologies Using Tantalum Barrier Layer for Future ULSIs with Cu/Low-k Interconnect Processes," Japanese Journal of Applied Physics, vol. 44, pp. 5309-5312, 2005.
    • (2005) Japanese Journal of Applied Physics , vol.44 , pp. 5309-5312
    • Horibe, M.1    Nihei, M.2    Kondo, D.3    Kawabata, A.4    Awano, Y.5
  • 17
    • 33646194603 scopus 로고    scopus 로고
    • Effects of a Carbon Nanotube Layer on Electrical Contact Resistance Between Copper Substrates
    • M. Park, B. A. Cola, T. Siegmund, J. Xu, M. R. Maschmann, T. S. Fisher, and H. Kim, "Effects of a Carbon Nanotube Layer on Electrical Contact Resistance Between Copper Substrates," Nanotechnology, vol. 17, pp. 2294-2303, 2006.
    • (2006) Nanotechnology , vol.17 , pp. 2294-2303
    • Park, M.1    Cola, B.A.2    Siegmund, T.3    Xu, J.4    Maschmann, M.R.5    Fisher, T.S.6    Kim, H.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.