A GaAs acoustic sensor with frequency output based on resonant tunneling diodes

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 42-46

  Zhang, Binzhen ^a   Wang, Jian ^a   Xue, Chenyang ^a   Zhang, Wendong ^a   Xiong, Jijun ^a  

^a NORTH UNIVERSITY OF CHINA   (China)

Author keywords

Acoustic sensor; Etch stop technology; GaAs; RTD

Indexed keywords

ACOUSTIC DEVICES; CURRENT VOLTAGE CHARACTERISTICS; NATURAL FREQUENCIES; NEGATIVE RESISTANCE; RESONANT TUNNELING; SEMICONDUCTING GALLIUM ARSENIDE;

ACOUSTIC SENSORS; ETCH STOP TECHNOLOGY; NEGATIVE DIFFERENTIAL RESISTANCE (NDR); RESONANT TUNNELING DIODES;

SENSORS;

EID: 34548172537     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.011     Document Type: Article

References (13)

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