Electrohydrodynamic (EHD) micro-boat

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 584-587

  Wang, Jiun Min ^a   Lin, Tzu Yuan ^a   Yang, Lung Jieh ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

Electrohydrodynamic (EHD); Micro boat; Parylene

Indexed keywords

CAPACITORS; ELECTRODES; ELECTROHYDRODYNAMICS; MEMS; VELOCITY CONTROL;

MICRO-BOATS; PARYLENE; PARYLENE MEMS TECHNOLOGY;

MICROSTRUCTURE;

EID: 34548140555     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352087     Document Type: Conference Paper

References (8)

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