Nanomechanical chemical sensor platform

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 886-889

  Lim, Si Hyung ^a   Jaworski, Justyn ^b   Satyanarayana, Srinath ^a   Wang, Frank ^b   Raorane, Digvijay ^a   Lee, Seung Wuk ^b,c   Majumdar, Arunava ^a,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Bio receptors; Chemical sensing; Micromembrane; Selectivity; Sensitivity

Indexed keywords

INTEGRATED CONTROL; MOLECULAR STRUCTURE; NANOMECHANICS; PHASE MEASUREMENT; SENSOR ARRAYS;

BIO RECEPTORS; CHEMICAL SENSING; GAS PHASE CHEMICAL SENSING; MICROMEMBRANES;

CHEMICAL SENSORS;

EID: 34548135199     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352160     Document Type: Conference Paper

References (5)

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2. T. Thundat and A. Majumdar, Sensors and Sensing in Biology and Engineering. Springer-Verlag, 2003.
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4. S. Satyanarayana, D. T. McCormick, A. Majumdar, "Parylene micro membrane capacitive sensor array for chemical and biological sensing," Sensors and Actuators B: Chemical, vol. 115, pp.494-502, 2005.
5. S. Satyanarayana, "Surface Stress and Capacitive MEMS Sensor Arrays for Chemical and Biological Sensing," Ph.D. Dissertation, UC Berkeley, 2005.