A detection method of mura on a coated layer using interference light

Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics

Volumn 6, Issue , 2006, Pages 5047-5052

  Taniguchi, Kazutaka ^a   Ueta, Kunio ^a   Tatsumi, Shoji ^b  

^a DAINIPPON SCREEN MFG CO LTD   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; LIGHTING; PHOTORESISTS; REFLECTION; SODIUM;

COATED LAYER; DEVICE QUALITY; INTERFERENCE LIGHT; MURA;

DISPLAY DEVICES;

EID: 34548133687     PISSN: 1062922X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSMC.2006.385108     Document Type: Conference Paper

References (8)

1. Semiconductor Equipment and Materials International Document #3324, "New Standard: Definition of Measurement Index (SEMU) for Luminance Mura in FPD."
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3. H. Nakano, Y. Yoshida, K. Fujita, "A Method to Aid Detection of Macro Defects of Color Liquid Crystal Display through Gabor Function," J. IEICE Vol.J80-D-II 3, 1997, pp.734-744, (in Japanese).
4. K. Tanahashi, M. Kohchi, "Automatic measurement method of MURA in liquid crystal displays based on the sensory index", 8th Intelligent Mechatronics Workshop, 2003 pp.183-188.
5. K. Nakashima, "Hybrid Inspection System for LCD Color Filter Panels, IEEE Instrumentation and Measurement Technology Conf. '94 Hamamatsu Japan, 1994, pp.689-691.
6. K. Taniguchi, K. Ueta, S. Tatsumi "A mura detection based on the least detectable contrast of human vision", pp. 1024-1030,ICCVG Warsaw, Poland 2004.
7. K. Taniguchi, K. Ueta, S. Tatsumi "A detection method for irregular lightness variation of low contrast", IEEE International Conference of SMC 2004, pp.6401-6.
8. H.A.Macleod "Thin-Film Optical Filters, 2nd edition", Macmillan, New York, 1986.