Fabrication of microneedles

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 639-642

  Hsu, Chin Chun ^a   Chen, Yu Tang ^b   Tsai, Chieh Hsiu ^a   Kang, Shung Wen ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

^b DE LIN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Fast etching planes; Microneedles; Photolithography; SU 8; V groove

Indexed keywords

DRUG DELIVERY; ETCHING; MICROFABRICATION; PHOTOLITHOGRAPHY; POLYMERS; SILICON WAFERS;

FAST ETCHING PLANES; MICRONEEDLES; V-GROOVE;

MICROSTRUCTURE;

EID: 34548126886     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352099     Document Type: Conference Paper

References (7)

1. L. J. Guerin, M. Bossel, S. Calmes, M. Demierre and P. Renaud, "Simple and Low Cost Fabrication of Embedded Micro-channels by Using a New Thick-film Photoplastic", TRANSDUCERS '97 Chicago, International Conference, pp. 16-19, 1997.
2. Liwei Lin, Albert P. Pisano, "Silicon-Processed Microneedles", IEEE Journal of Micro Electro Mechanical System, Vol. 8, pp. 78-84, 1999.
3. Kabseog Kim, Daniel S Park, Hong M Lu, Wooseong Che, Kyunghwan Kim, Jeong Bong Lee and Chong H Ahn, "A Tapered Hollow Metallic Microneedle array Using Backside Exposure of SU-8" Journal of Micromechanics and Microengeering Vol. 14, pp. 597-603, 2003.
4. Han J. G. E. Gardeniers, Regina Luttge, Erwin J. W. Berenschot, Meint J. de Boer Shuki Y. Yeshurun, Meir Hefetz, Ronny van't Oever, and Albert van den Berg, "Silicon Micromachined Hollow Microneedles for Transdermal Liquid Transport" Journal of Microelectromechanical System, Vol. 12, pp. 855-862, 2003.
5. Shyh-Chyi Kuo and Yukon Chou, "A Novel Polymer Microneedle and PDMS Micromolding Technique" Tamkang Journal of Science and Engineering, Vol. 7, pp 95-98, 2004.
6. Seung-Joon Paik, Sangwon Byun, Jung-Min Lim, Yonghwa Park, Ahra Lee, Seok Chung, Junkeun Chang, Kukjin Chun, Dongil "Don" Cho, "In-plane Single-crystal-silicon Microneedles for Minimally Invasive Microflud Systems" Sensors and Actuators Vol. 114, pp. 276-284, 2004.
7. Nicolle Wilke, Michael L Reed, and Anthony Morrissey, "The Evolution from Convex Corner Undercut towards Microneedle Formation: Theory and Experimental Verification", Journal of Micro mechanics and Micro engineering, pp. 808-814, 2005.