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Volumn 5264, Issue , 2003, Pages 274-282

High-accuracy micro-assembly by intelligent vision systems and smart sensor integration

Author keywords

Flexible micro assembly system; Modular micro assembly tool system; Relative positioning strategies; Sensor integration

Indexed keywords

ASSEMBLY; AUTOMATION; DISPENSERS; FIBER OPTIC SENSORS; GRIPPERS; INTELLIGENT CONTROL; OPTICAL FIBERS; POSITION CONTROL; ROBOTICS; SOLDERING; TOOLS; VISION;

EID: 1242275385     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.516110     Document Type: Conference Paper
Times cited : (2)

References (8)
  • 2
    • 1242304337 scopus 로고    scopus 로고
    • Assembly of semiconductor based microsystems with sensor guided tools
    • Reichl, H. (Ed.), Nuremberg. Berlin: VDE
    • Jacob, D.; Höhn, M.: Assembly of semiconductor based microsystems with sensor guided tools. In: Reichl, H. (Ed.): System Integration in Micro Electronics, Nuremberg. Berlin: VDE 2000, pp.193-202.
    • (2000) System Integration in Micro Electronics , pp. 193-202
    • Jacob, D.1    Höhn, M.2
  • 4
    • 0010945933 scopus 로고    scopus 로고
    • Positioning Strategies and Sensor Integration in Tools for Assembly MOEMS
    • Motamedi, M.; Goering, R. MOEMS and Miniaturized Systems, Santa Clara. Washington, 2000
    • Reinhart, G.; Jacob, D.: Positioning Strategies and Sensor Integration in Tools for Assembly MOEMS. In: Motamedi, M.; Goering, R.: MOEMS and Miniaturized Systems, Santa Clara. Washington: Proceedings of SPIE Vol. 4178 (2000), S. 395-402, 2000.
    • (2000) Proceedings of SPIE , vol.4178 , pp. 395-402
    • Reinhart, G.1    Jacob, D.2
  • 7
    • 0035768199 scopus 로고    scopus 로고
    • Automated Assembly of Holder Chips to AFM probes
    • Nelson, B. J.; Breguet, J.-M. (Eds.): Microrobotics and Microassembly III, Boston, USA. Washington
    • Reinhart, G.; Jacob, D.; Fouchier, M.: Automated Assembly of Holder Chips to AFM probes. In: Nelson, B. J.; Breguet, J.-M. (Eds.): Microrobotics and Microassembly III, Boston, USA. Washington: Proceedings of SPIE Vol. 4568 (2001), pp. 310-317.
    • (2001) Proceedings of SPIE , vol.4568 , pp. 310-317
    • Reinhart, G.1    Jacob, D.2    Fouchier, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.