A new approach to on-line rescheduling for a semiconductor foundry fab

Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics

Volumn 6, Issue , 2006, Pages 4727-4732

  Huang, Han Pang ^b   Chen, Tien Ying ^a,b  

^a IEEE

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL COMPLEXITY; GENETIC ALGORITHMS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

ADAPTIVE NEURO FUZZY INFERENCE SYSTEM (ANFIS); SEMICONDUCTOR WAFER FABRICATION SYSTEMS; THEORY OF CONSTRAINTS (TOC);

ONLINE SYSTEMS;

EID: 34548125465     PISSN: 1062922X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSMC.2006.385051     Document Type: Conference Paper

References (17)

1. N. Bahaji and M. E. Kuhl, "A Simulation Study of Composite Dispatching Rules, CONWIP and Push Lot Release in Semiconductor Fabrication," International Journal of Production Research, submitted for publication.
2. S. H. Chung, H. I. Lee, and W. L. Pearn, "Product Mix Optimization for Semiconductor Manufacturing Based on AHP and ANP Analysis," International Journal of Advanced Manufacturing Technology, Vol. 25, No. 11, pp. 1144-1156, Jun. 2005.
3. C. Cortes and V. Vapnik, "Support-Vector Networks," Machine Learning, Vol. 20, No. 3, pp, 273-297, Sep. 1995.
4. T. C. Hsu and S. H. Chung, "The TOC-Based Algorithm for Solving Product Mix Problems," Production Planning and Control, Vol. 9, No. 1, pp. 36-46, Jan. 1998.
5. C. W. Hsu and C. J. Lin, "A Comparison of Methods for Multi-Class Support Vector Machines," IEEE Transactions on Neural Networks, Vol. 13, No. 2, pp. 415-425, Mar. 2002.
6. S. R. Jang, "ANFIS: Adaptive-Network-Based Fuzzy Inference System," IEEE Transactions on Systems, Man and Cybernetics, Vol. 23, No. 3, pp. 665-685, Jun. 1993.
7. S. R. Jang, C. T. Sun, and E. Mizutani, Neuro-Fuzzy and Soft Computing, 1st Edition, New Jersey: Prentice-Hall, pp. 175-180, 1997.
8. R. Kumar, M. K. Tiwari, and V. Aliada, "Modeling and Rescheduling of a Re-Entrant Wafer Fabrication Line Involving Machine Unreliability," International Journal of Production Research, Vol. 42, No. 21, pp. 4431-4455, Nov. 2004.
9. A. Malik and W. Sullivan, "Impact of ABC Information on Product Mix and Costing Decisions," IEEE Transactions on Engineering Management, Vol. 42, No. 2, pp. 171-176, May 1995.
10. R. T. Marler and J. S. Arora, "Survey of Multi-Objective Optimization Methods for Engineering," Structural and Multidisciplinary Optimization, Vol. 26, No. 6, pp. 369-395, Apr. 2004.
11. R. Rangsaritratsamee, W. G. Ferrell, and M. B. Kurz, "Dynamic Rescheduling that Simultaneously Considers Efficiency and Stability," Computers and Industrial Engineering, Vol. 46, No. 1, pp. 1-15, Mar. 2004.
12. C. R. Tsai, "Development of a Real-Time Scheduling and Rescheduling System Based on RFID for Semiconductor Foundry Fabs," Master Thesis, Graduate Institute of Industrial Engineering, National Taiwan University, 2005.
13. R. Uzsoy, C. Y. Lee, and L. A. Matrin-Vega, "A Review of Production Planning and Scheduling Models in Semiconductor Industry, Part 1: System Characteristics, Performance Evaluation and Production Planning," HE Transactions on Scheduling and Logistics, Vol. 24, No. 4, pp. 47-59, 1992.
14. V. Vapnik, Statistical Learning Theory, 1 st Edition, New York: Wiley, 1998.
15. G. E. Vieira, J. W. Herrmann, and E. Lin, "Analytical Models to Predict the Performance of a Single-Machine System Under Periodic and Event-Driven Rescheduling Strategies," International Journal of Production Research, Vol. 38, No. 8, pp. 1899-1915, May 2000.
16. L. M. Wein, "Scheduling Semiconductor Wafer Fabrication," IEEE Transaction on Semiconductor Manufacturing, Vol. 1, pp. 115-130, Aug. 1988.
17. eM-Plant Homepage: http://www.emplant.de/simulation.html