Effect of preionization, fluorine concentration, and current density on the discharge uniformity in F2 excimer laser gas mixtures

Journal of Applied Physics

Volumn 102, Issue 3, 2007, Pages

  Mathew, D ^a   Bastiaens, H M J ^a   Boller, K J ^a   Peters, P J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC DISCHARGES; EXCIMER LASERS; IONIZATION; IONIZATION CHAMBERS;

FLUORINE CONCENTRATION; PREIONIZATION;

GAS MIXTURES;

EID: 34548099400     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2767869     Document Type: Article

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