Fabrication of nanohole array via nanodot array using simple self-assembly process of diblock copolymer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 6 B, 2007, Pages 3882-3885

  Matsuyama, Tsuyoshi ^b   Kawata, Yoshimasa ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Pulstec Industrial Co Ltd   (Japan)

Author keywords

Array; Diblock copolymer; Micelle; Nanodot; Nanohole; Patterned media; Self assembly

Indexed keywords

BLOCK COPOLYMERS; INTERFACIAL ENERGY; MICELLES; SELF ASSEMBLY; SURFACE PROPERTIES;

NANODOTS; NANOHOLES; PATTERNED MEDIA;

NANOSTRUCTURES;

EID: 34547908577     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.3882     Document Type: Article

References (15)

1. G. Widawski, M. Rawiso, and B. Franois: Nature (London) 369 (1994) 387.
2. F. S. Bates and G. H. Fredrickson: Phys. Today 52 (1999) 32.
3. Y.-H. Cho, J.-E. Yang, and J.-S. Lee: Mater. Sci. Eng. C 24 (2004) 293.
4. J. P. Spatz, S. Sheiko, and M. Möller: Macromolecules 29 (1996) 3220.
5. T. Matsuyama and Y. Kawata: Jpn. J. Appl. Phys. 44 (2005) 3524.
6. T. Matsuyama and Y. Kawata: Jpn. J. Appl. Phys. 45 (2006) L20.
7. T. Matsuyama and Y. Kawata: Jpn. J. Appl. Phys. 45 (2006) 1438.
8. J. Hellmann, M. Hamano, O. Karthaus, K. Ijiro, M. Shimomura, and M. Irie: Jpn. J. Appl. Phys. 37 (1998) L816.
9. K. Asakawa, T. Hiraoka, H. Hieda, M. Sakurai, Y. Kamata, and K. Naito: J. Photopolym. Sci. Technol. 15 (2002) 465.
10. S. Rath, O. Mager, M. Heilig, M. Strauß, O. Mack, and H. Port: J. Lumin. 94-95 (2001) 157.
11. Polymer Handbook, ed. J. Brandrup, E. H. Immergut, and E. A. Grulke (Wiley, New York, 1999) 4th ed., Chap. 7, p. 499.
12. J. R. Dann: J. Colloid Interface Sci. 32 (1970) 302.
13. T. W. Ebbesen: Nature (London) 391 (1998) 667.
14. S. Noda, A. Chutinan, and M. Imada: Nature (London) 407 (2000) 608.
15. J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart: IEEE Trans. Microwave Theory Tech. 47 (1999) 2075.