Growth mechanism of GaAs microdisk structures by area-selective epitaxy using migration-enhanced epitaxy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 2, 2007, Pages 514-517

  Iwai, Takayuki ^a   Toda, Takeshi ^a   Uehara, Takahiro ^a   Yoshiba, Ippei ^a   Horikoshi, Yoshiji ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Area selective epitaxy; MEE; Solid source MBE

Indexed keywords

EPITAXIAL GROWTH; OPTIMIZATION;

AREA-SELECTIVE EPITAXY; SOLID SOURCE MBE;

GALLIUM COMPOUNDS;

EID: 34547896685     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.514     Document Type: Article

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