Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 746-752

  Ozaki, Takashi ^a   Sugano, Koji ^a   Tsuchiya, Toshiyuki ^a   Tabata, Osamu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Nanodevice; Nanoparticle; Polydimethylsiloxane (PDMS); Self assembled monolayer (SAM); Self assembly; Template; Transfer

Indexed keywords

OPTIMIZATION; POLYDIMETHYLSILOXANE; POLYSTYRENES; SELF ASSEMBLED MONOLAYERS; SELF ASSEMBLY; SILICON WAFERS;

SUBMICROPARTICLE PATTERN FORMATION; TEMPLATE-ASSISTED SELF-ASSEMBLY; TWO-STEP TRANSFER;

NANOPARTICLES;

EID: 34547801834     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.897091     Document Type: Article

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