Density jump in helicon discharges

Plasma Sources Science and Technology

Volumn 16, Issue 3, 2007, Pages 593-596

  Chen, Francis F ^a   Torreblanca, Humberto ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC LOSSES; MAGNETIC FIELDS; PHASE TRANSITIONS; POWER CONTROL;

HELICON MODES; PARASITIC CIRCUIT LOSSES;

PLASMA DENSITY;

EID: 34547773803     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/3/019     Document Type: Article

References (9)

1. Ellingboe A R and Boswell R W 1996 Phys. Plasmas 3 2797
2. Shamrai K P 1998 Plasma Sources Sci. Technol. 7 499
3. Lee M H, Lee K H, Hyun D S and Chung C W 2007 Appl. Phys. Lett. 90 191502
4. Chen F F and Torreblanca H 2007 Plasma Phys. Control. Fusion 49 A81
5. Chen F F 2003 Phys. Plasmas 10 2586
6. Arnush D 2000 Phys. Plasmas 7 3042
7. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing 2nd edn (New York: Wiley) p 333
8. Chen F F and Chang J P 2002 Principles of Plasma Processing (New York: Kluwer/Plenum) p 71
9. Vahedi V 1993 Modeling and simulation of RF discharges used for plasma processing Thesis University of California, Berkeley