A low-temperature thermopneumatic actuation principle for gas bubble microvalves

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 765-774

  van der Wijngaart, Wouter ^a   Chugh, Dipankar ^a   Man, Elisabeth ^a   Melin, Jessica ^a,b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b Stanford University   (United States)

Author keywords

Bubble valve; Microfluidics; Microvalve; Surface tension; Thermopneumatic

Indexed keywords

ELECTRON TUBES; MICROACTUATORS; SURFACE TENSION; TEMPERATURE CONTROL; THERMAL EXPANSION;

EQUILIBRIUM GAS COMPOSITION; GAS BUBBLE MICROVALVES; THERMALLY CONTROLLED VOLUME DISPLACING ELEMENT; VALVE GEOMETRY;

MICROFLUIDICS;

EID: 34547736592     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.893514     Document Type: Article

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