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Volumn 584, Issue , 2007, Pages 337-356

Mass flow rate measurements in a microchannel, from hydrodynamic to near free molecular regimes

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHANNEL FLOW; FLOW MEASUREMENT; FLOW RATE; MICROCHANNELS; POLYNOMIALS;

EID: 34547684494     PISSN: 00221120     EISSN: 14697645     Source Type: Journal    
DOI: 10.1017/S0022112007006374     Document Type: Article
Times cited : (199)

References (30)
  • 1
    • 0000614290 scopus 로고
    • Numerical evaluation of the slip coefficient
    • ALBERTONI, S., CERCIGNANI, C. & GOTUSSO, L. 1963 Numerical evaluation of the slip coefficient. Phys. Fluids 6, 993-996.
    • (1963) Phys. Fluids , vol.6 , pp. 993-996
    • ALBERTONI, S.1    CERCIGNANI, C.2    GOTUSSO, L.3
  • 3
    • 0035947940 scopus 로고    scopus 로고
    • Mass flow and tangential momentum accommodation in silicon micromachined channels
    • ARKILIC, E., BREUER, K. & SCHMIDT, M. 2001 Mass flow and tangential momentum accommodation in silicon micromachined channels. J. Fluid Mech. 437, 29-43.
    • (2001) J. Fluid Mech , vol.437 , pp. 29-43
    • ARKILIC, E.1    BREUER, K.2    SCHMIDT, M.3
  • 4
    • 34547680026 scopus 로고    scopus 로고
    • CERCIGNANI, C. 1964 Higher order slip according to the linearized Boltzmann equation. Institute of Engineering Res. Rep. AS-64-19, University of California, Berkeley.
    • CERCIGNANI, C. 1964 Higher order slip according to the linearized Boltzmann equation. Institute of Engineering Res. Rep. AS-64-19, University of California, Berkeley.
  • 6
    • 34547702340 scopus 로고
    • Flow of a rarefied gas between two parallel plates
    • CERCIGNANI, C. & DANERI, A. 1963 Flow of a rarefied gas between two parallel plates. Phys. Fluids 6, 993-996.
    • (1963) Phys. Fluids , vol.6 , pp. 993-996
    • CERCIGNANI, C.1    DANERI, A.2
  • 8
    • 2942695109 scopus 로고    scopus 로고
    • Validation of a second-order slip flow model in rectangular microchannels
    • COLIN, S., LALONDE, P. & CAEN, R. 2004 Validation of a second-order slip flow model in rectangular microchannels. Heat Transfer Engng 25(3), 23-30.
    • (2004) Heat Transfer Engng , vol.25 , Issue.3 , pp. 23-30
    • COLIN, S.1    LALONDE, P.2    R., C.A.E.N.3
  • 9
    • 0001027013 scopus 로고
    • An analysis of second-order slip flow and temperature-jump boundary conditions for rarefied gases
    • DEISSLER, R. G. 1964 An analysis of second-order slip flow and temperature-jump boundary conditions for rarefied gases. Intl J. Heat Mass Transfer 7, 681-694.
    • (1964) Intl J. Heat Mass Transfer , vol.7 , pp. 681-694
    • DEISSLER1    G., R.2
  • 10
    • 0009343877 scopus 로고
    • Vacuum flow of gases through channels with circular, annular, and rectangular cross sections
    • DONG, W. 1956 Vacuum flow of gases through channels with circular, annular, and rectangular cross sections. University of California Rep UCRL-3353.
    • (1956) University of California Rep UCRL-3353
    • DONG, W.1
  • 11
  • 12
    • 33747878276 scopus 로고    scopus 로고
    • Analytical and numerical description for isothermal gas flows in microchannels
    • GRAUR, I. A., MÉOLANS, J. G. & ZEITOUN, D. E. 2006 Analytical and numerical description for isothermal gas flows in microchannels. Microfluid. Nanofluid. 2, 64-77.
    • (2006) Microfluid. Nanofluid , vol.2 , pp. 64-77
    • GRAUR, I.A.1    MÉOLANS, J.G.2    ZEITOUN, D.E.3
  • 17
    • 0008865470 scopus 로고
    • Kinetic theory of thermal transpiration and mechanocaloric effects II
    • LOYALKA, S. K. 1975 Kinetic theory of thermal transpiration and mechanocaloric effects II. J. Chem. Phys. 63, 4054.
    • (1975) J. Chem. Phys , vol.63 , pp. 4054
    • LOYALKA1    K., S.2
  • 18
    • 0000752046 scopus 로고
    • Some numerical results for the BGK model: Thermal creep and viscous slip problems with arbitrary accommodation of the surface
    • LOYALKA, S. K., PETRELLIS, N. & STVORICK, S. T. 1975 Some numerical results for the BGK model: Thermal creep and viscous slip problems with arbitrary accommodation of the surface. Phys. Fluids 18, 1094.
    • (1975) Phys. Fluids , vol.18 , pp. 1094
    • LOYALKA, S.K.1    PETRELLIS, N.2    STVORICK, S.T.3
  • 19
    • 0017025265 scopus 로고
    • Poiseulle flow and thermal creep flow in long, rectangular channels in the molecular and transition flow regimes
    • LOYALKA, S. K., STVORIK, T. S. & PARK, H. S. 1976 Poiseulle flow and thermal creep flow in long, rectangular channels in the molecular and transition flow regimes, J. Vac. Sci. Technol. 13, N6, 1188.
    • (1976) J. Vac. Sci. Technol , vol.13 , Issue.N6 , pp. 1188
    • LOYALKA, S.K.1    STVORIK, T.S.2    PARK, H.S.3
  • 20
    • 0000911805 scopus 로고
    • On stress in rarified gases arising from inequalities of temperature
    • MAXWELL, J. C. 1878 On stress in rarified gases arising from inequalities of temperature. Phil. Trans. R. Soc. Lond. 170, 231-256.
    • (1878) Phil. Trans. R. Soc. Lond , vol.170 , pp. 231-256
    • MAXWELL1    C., J.2
  • 21
    • 0141538115 scopus 로고    scopus 로고
    • Second-order slip laws in microchannels for helium and nitrogen
    • MAURER, J., TABELIN, P., JOSEPH, P. & WILLAIME, H. 2003 Second-order slip laws in microchannels for helium and nitrogen. Phys. Fluids 15, 2613-2621
    • (2003) Phys. Fluids , vol.15 , pp. 2613-2621
    • MAURER, J.1    TABELIN, P.2    JOSEPH, P.3    WILLAIME, H.4
  • 22
    • 36549094315 scopus 로고
    • Numerical analysis of the Poiseuille and thermal transpiration flows between two parallel plates on the basis of the Boltzmann equation for hard sphere molecules
    • OHWADA, T., SONE, Y. & AOKI, K. 1989 Numerical analysis of the Poiseuille and thermal transpiration flows between two parallel plates on the basis of the Boltzmann equation for hard sphere molecules. Phys. Fluids A 1, 2042-2049.
    • (1989) Phys. Fluids A , vol.1 , pp. 2042-2049
    • OHWADA, T.1    SONE, Y.2    K., A.O.K.I.3
  • 24
    • 0016387580 scopus 로고
    • Experimental investigation of rarefied gas flow in different channels
    • PORODNOV, B. T., SUETIN, P. E., BORISOV, S. F. & AKINSHIN, V. D. 1974 Experimental investigation of rarefied gas flow in different channels. J. Fluid Mech. 64, 417-437.
    • (1974) J. Fluid Mech , vol.64 , pp. 417-437
    • PORODNOV, B.T.1    SUETIN, P.E.2    BORISOV, S.F.3    AKINSHIN, V.D.4
  • 25
    • 0033457775 scopus 로고    scopus 로고
    • Rarefied gas flow through a long rectangular channel
    • SHARIPOV, F. 1999a Rarefied gas flow through a long rectangular channel. J. Vac. Sci. Technol. A 17, N 5, 3062-3066.
    • (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.5 , pp. 3062-3066
    • SHARIPOV, F.1
  • 26
    • 0033350193 scopus 로고    scopus 로고
    • Non-isothermal gas flow through rectangular channels
    • SHARIPOV, F. 1999b Non-isothermal gas flow through rectangular channels. J. Micromech. Microengng 9, 394-401.
    • (1999) J. Micromech. Microengng , vol.9 , pp. 394-401
    • SHARIPOV, F.1
  • 27
    • 0032362164 scopus 로고    scopus 로고
    • Data on internal rarefied gas flows
    • SHARIPOV, F. & SELEZNEV, V. 1998 Data on internal rarefied gas flows. J. Phys. Chem. Ref. Data 27(3), 657-709.
    • (1998) J. Phys. Chem. Ref. Data , vol.27 , Issue.3 , pp. 657-709
    • SHARIPOV, F.1    SELEZNEV, V.2
  • 28
    • 84976113455 scopus 로고
    • Poiseuille flow at arbitrary Knudsen numbers and tangential momentum accommodation
    • SUETIN, P. E., PORODNOV, B. T., CHERNJAK, V. G. & BORISOV, S. F. 1973 Poiseuille flow at arbitrary Knudsen numbers and tangential momentum accommodation. J. Fluid Mech. 60, 585-592.
    • (1973) J. Fluid Mech , vol.60 , pp. 585-592
    • SUETIN, P.E.1    PORODNOV, B.T.2    CHERNJAK, V.G.3    BORISOV, S.F.4
  • 29
    • 0027702960 scopus 로고
    • Experimental data and theoretical modeling of gas flows through metal capillary leaks
    • TISON, S. A. 1993 Experimental data and theoretical modeling of gas flows through metal capillary leaks. Vacuum 44, 1171-1175.
    • (1993) Vacuum , vol.44 , pp. 1171-1175
    • TISON1    A., S.2
  • 30
    • 0037059085 scopus 로고    scopus 로고
    • Subsonic gas flow in a straight and uniform microchannel
    • ZOHAR, Y., LEE, S. Y. K., LEE,W. Y., JIANG, L. & TONG, P. 2002 Subsonic gas flow in a straight and uniform microchannel. J. Fluid Mech. 472, 125-151.
    • (2002) J. Fluid Mech , vol.472 , pp. 125-151
    • ZOHAR, Y.1    LEE, S.Y.K.2    LEE, W.Y.3    JIANG, L.4    P., T.O.N.G.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.