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Volumn 52, Issue 4, 2007, Pages 686-690
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Modification of birefringence properties of nanostructured silicon with a change in the level of substrate doping with boron
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Author keywords
[No Author keywords available]
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Indexed keywords
BIREFRINGENCE;
BORON;
DOPING (ADDITIVES);
ELECTROCHEMICAL ETCHING;
NANOSTRUCTURED MATERIALS;
BIREFRINGENCE PROPERTIES;
POROUS SILICON FILMS;
SUBSTRATE DOPING;
UNIAXIAL CRYSTALS;
SILICON COMPOUNDS;
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EID: 34547677930
PISSN: 10637745
EISSN: None
Source Type: Journal
DOI: 10.1134/S1063774507040165 Document Type: Article |
Times cited : (3)
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References (11)
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