Optical and structural studies of silicon-enriched films obtained by dc-magnetron co-sputtering

Materials Science and Engineering C

Volumn 27, Issue 5-8 SPEC. ISS., 2007, Pages 1074-1077

  Aguilar Hernandez J R ^a   Monroy Rodriguez G ^a   Cardenas Garcia M ^a   Contreras Puente, G S ^a  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

Author keywords

Optical properties; Photoluminescence; Silicon nanoparticles; SiO2 matrix

Indexed keywords

MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; RELAXATION PROCESSES; SILICON;

ROOM TEMPERATURE; SI-MOLAR; SILICON NANOPARTICLES;

THIN FILMS;

EID: 34547668874     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.06.018     Document Type: Article

References (13)

1. Kanemitsu Y., Hiroshi U., Yasuaki M., and Yoshihito M. Appl. Phys. Lett. 61 (1992) 2187
2. In: Loockwood D. (Ed). Light Emission in Silicon. Semiconductors and Semimetals vol. 49 (1997), Academic, Orlando Fl
3. Cullis G., Canham L., and Calcott P. J. Appl. Phys. 82 (1997) 909
4. Kanemitsu Y., Okamoto S., Otobe M., and Oda S. Phys. Rev. B 55 (1997) R7375
5. Kanemitsu Y., Ogawa T., Shirahishi K., and Takeda K. Phys. Rev. B 48 (1993) 4883
6. Wu W., Huang X., Chen J., Xu J., and Gao X. J. Vac. Sci. Technol. A 17 (1999) 159
7. Prokes S., Carlos W., Veprek S., and Ossadnik Ch. Phys. Rev. B 58 (1998) 15632
8. Tsybeskov L., Grom G., Fauchet M., McCaffrey P., Dzhumaev B., and Prokes S. Microelectron. Eng. 51-52 (2000) 485
9. Aguilar-Hernandez J., Contreras-Puente G., Morales-Acevedo A., Vigil-Galan O., Cruz-Gandarilla F., et al. Semicond. Sci. Technol. 18 (2003) 111
10. Shimizu-Iwayama T., Fujita K., Nakao S., Saitoh K., Fujita T., and Itoh N. J. Appl. Phys. 75 (1994) 7779
11. Qin G., Li A., and Zhang Y. Phys. Rev. B 54 (1996) 11122
12. Richter H., Wang Z., and Ley L. Solid State Commun. 39 (1981) 625
13. Prokes S., Glembocki O., Bermudez V., and Kaplan R. Phys. Rev. B 45 (1992) 13788