Theoretical determination of accurate rate constants: Application to the decomposition of a single-molecule precursor

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 8818-8824

  Tafipolsky, Maxim ^a   Schmid, Rochus ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

CVD; Flexible transition state theory; Gallium nitride; Rate constant; Single molecule precursor

Indexed keywords

FREE ENERGY; GALLIUM NITRIDE; MATHEMATICAL MODELS; MOLECULES; MONTE CARLO METHODS; POTENTIAL ENERGY; RATE CONSTANTS; SAMPLING;

FLEXIBLE TRANSITION STATE THEORY; SINGLE-MOLECULE PRECURSOR; UNIMOLECULAR DECOMPOSITION;

CHEMICAL VAPOR DEPOSITION;

CHEMICAL VAPOR DEPOSITION; FREE ENERGY; GALLIUM NITRIDE; MATHEMATICAL MODELS; MOLECULES; MONTE CARLO METHODS; POTENTIAL ENERGY; RATE CONSTANTS; SAMPLING;

EID: 34547656346     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.054     Document Type: Article

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