Carrier mobilities in microcrystalline silicon films

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7486-7489

  Bronger, T ^a   Carius, R ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Electrical properties; Microcrystalline silicon; Mobility; Thin film silicon

Indexed keywords

DOPING (ADDITIVES); ELECTRIC PROPERTIES; ELECTRON ENERGY LEVELS; HALL MOBILITY; MICROCRYSTALLINE SILICON; SOLAR CELLS;

AMORPHOUS FRACTION; DOPING CONCENTRATIONS; ELECTRONIC TRANSPORT; THIN-FILM SILICON;

THIN FILMS;

EID: 34547576299     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.091     Document Type: Article

References (11)

1. Vetterl O., Finger F., Carius R., Hapke P., Houben L., Kluth O., Lambertz A., Mück A., Rech B., and Wagner H. Sol. Energy Mater. Sol. Cells 62 (2000) 97
2. Willeke G. In: Kanicki J. (Ed). Materials and Device Physics. Amorphous and Microcrystalline Semiconductor Devices vol. 2 (1992), Artech House, Boston 55 chap. 2
3. Carius R., Müller J., Finger F., Harder N., and Hapke P. Thin Film Material and Devices - Developments in Science and Technology (1999), World Scientific Co. Pte. Ltd., Singapore 157
4. Backhausen U., Carius R., Finger F., Hapke P., Zastrow U., and Wagner H. Mater. Res. Soc. Symp. Proc. 452 (1997) 833
5. Houben L., Luysberg M., Hapke P., Carius R., Finger F., and Wagner H. Philos. Mag., A 77 (1998) 1447
6. Overhof H., and Thomas P. Electronic Transport in Hydrogenated Amorphous Semiconductors. Springer Tracts in Modern Physics vol. 114 (1989), Springer
7. Seto J. J. Appl. Phys. 46 (1975) 5247
8. N. Harder, Elektrischer Transport in dotierten und undotierten mikrokristallinen Siliziumschichten, Diploma thesis, Universität Leipzig, Germany (2000).
9. Overhof H., Otte M., Schmidtke M., Backhausen U., and Carius R. J. Non-Cryst. Solids 227 (1998) 992
10. Carius R., Finger F., Backhausen U., Luysberg M., Hapke P., Houben L., Otte M., and Overhof H. Mater. Res. Soc. Symp. Proc. 467 (1997) 283. 9
11. Werner J., and Peisl M. Phys. Rev., B, Condens. Matter Mater. Phys. 31 (1985) 6881