Model and method to determine dwell time in ion beam figuring

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 5, Issue 2, 2007, Pages 107-112

  Zhou, Lin ^a   Dai, Yi Fan ^a   Xie, Xu Hui ^a   Jiao, Chang Jun ^a   Li, Sheng Yi ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

CEH model; Ion beam figuring; L curve; Optics fabrication; Truncated singular value decomposition

Indexed keywords

CEH MODEL; ION BEAM FIGURING; L-CURVE; OPTICS FABRICATION; TRUNCATED SINGULAR VALUE DECOMPOSITION;

CONVOLUTION; ION BEAM LITHOGRAPHY; MATHEMATICAL MODELS; SINGULAR VALUE DECOMPOSITION; TWO DIMENSIONAL;

MICROFABRICATION;

EID: 34547336715     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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