Formation and characterization of Pd, Pt and Pd-Pt alloy films on polyimide by catalyst-enhanced chemical vapor deposition

Journal Wuhan University of Technology, Materials Science Edition

Volumn 22, Issue 1, 2007, Pages 161-164

  Zhou, Jinlan ^a   Cheng, Yinhua ^a   Yousuf, Hamadan ^a   Yu, Kaichao ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Catalyst enhanced chemical vapor deposition (CECVD); Palladium platinum alloy film; Platinum metal film; Polyimide (PI)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPLEXATION; METALLIC FILMS; POLYIMIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

CATALYST-ENHANCED CHEMICAL VAPOR DEPOSITION (CECVD); PALLADIUM-PLATINUM ALLOY FILM; PLATINUM METAL FILM;

PALLADIUM ALLOYS;

EID: 34547237904     PISSN: 10002413     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11595-005-1161-8     Document Type: Article

References (7)

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