SCOPUS 정보 검색 플랫폼

Volumn 91, Issue 2, 2007, Pages

High speed atomic force microscope lithography driven by electrostatic interaction

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COULOMB INTERACTIONS; DEPOSITION; LITHOGRAPHY; SILICON;

CHARGE SEPARATION; HIGH SPEED ATOMIC FORCE MICROSCOPE LITHOGRAPHY; SCANNING PROBE LITHOGRAPHY;

NANOPARTICLES;

EID: 34547234544 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2756138 Document Type: Article

Times cited : (8)

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