An integrated vapor source with a porous silicon wick

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1449-1453

  Wallner, J Z ^a,b   Kunt, K S ^b   Obanionwu, H ^b   Oborny, M C ^b,c   Bergstrom, P L ^a,b   Zellers, E T ^b  

^a Michigan Technological University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION MODEL; MICRO DIFFUSION SYSTEM; REFILLABLE RESERVOIR; ROOM TEMPERATURE;

DIFFUSION; GAS CHROMATOGRAPHY; THERMAL EFFECTS; VAPORS;

POROUS SILICON;

EID: 34547145869     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674383     Document Type: Article

References (8)

1. E. T. Zellers, K. D. Wise, K. Najafi, D. Aslam, R. B. Brown, Q. Y. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. D. Hsieh, C. T.-C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M. Kaviany, C. J. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, and Q. Zhong, Technical Digest of the IEEE Conference on Technologies for Homeland Security (Boston, 2002), p. 92.
2. S. C. Terry, J. H. Jerman, and J. B. Angell, IEEE Trans. Electron Devices 26, 1880 (1979).
3. M. W. Bruns, Proceedings of 1992 International Conference on Industry Electronics, Control, Instrumentation and Automation, Nov. 1992, pp. 1640-1644.
4. R. R. Reston and E. S. Kolesar, J. Microelectromech. Syst. 3, 134 (1994).
5. G. Wiranto, M. R. Haskard, D. E. Mulcahy, D. E. Davey, and E. F. Dawes, Proceedings of 1999 SPIE Conference on Electronics and Structures for MEMS, Washington, USA, Oct. 1999, pp. 168-177.
6. M. C. Oborny, J. Zheng, J. M. Nichols, C.-J. Lu, P. L. Bergstrom, R. P. Manginell, G. C. Frye-Mason, and E. T. Zellers, μTAS2003, Squaw Valley, USA (2003).
7. C. R. Friedrich and P. J. Coane, J. Microelectronic Engineering 35, 367 (1997).
8. J. Zheng, M. Christophersen, and P. L. Bergstrom, phys. stat. sol. (a) 202(8), 1402 (2005).