Morphological and structural studies of WO x thin films deposited by laser ablation

Applied Surface Science

Volumn 253, Issue 19, 2007, Pages 8258-8262

  Filipescu, M ^a   Orlando, S ^b   Russo, V ^c   Lamperti, A ^d   Purice, A ^a   Moldovan, A ^a   Dinescu, M ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b CNR   (Italy)

^c POLITECNICO DI MILANO   (Italy)

^d DURHAM UNIVERSITY   (United Kingdom)

Author keywords

Auger electron; PLD; Raman spectroscopies; RF PLD; Tungsten oxide; X ray diffraction

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL SENSORS; LASER ABLATION; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION;

PHOTOCHROMIC DEVICES; RADIO FREQUENCY ASSISTED PLD (RF-PLD); REACTIVE OXYGEN ATMOSPHERE; TUNGSTEN OXIDE;

THIN FILMS;

EID: 34447335345     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.171     Document Type: Article

References (8)

1. Ashirt P.V., Bader G., and Truong V.-V. Thin Solid Films 320 (1998) 324
2. Xu Z., Vetelino J.F., Lec R., and Parker D.C. J. Vac. Sci. Technol. A 8 (1990) 3634
3. Tagtstrom P., and Jansson U. Thin Solid Films 352 (1999) 107
4. Haro-Poniaowski E., Jouanne M., and Morhange J.F. Appl. Surf. Sci. 127-129 (1998) 674
5. Lee S.H., Cheong H.M., Edwin C., Pitts J.R., and Deb S.K. Appl. Phys. Lett. 76 (2000) 3908
6. Dinescu G., Mitu B., Aldea E., and Dinescu M. Vacuum 56 (2000) 83
7. Boulova M., and Lucazeau G. J. Solid State Chem. 167 (2002) 425
8. Holy V., Pietsch U., and Baumbach T. X-Ray Scattering From Thin Films And Multilayers (1999), Springer, Berlin