Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency

Revista Mexicana de Fisica

Volumn 51, Issue 3, 2005, Pages 274-283

  Flores Camacho, J M ^a   Nunez Olvera O F ^a   Rodriguez Pedroza G ^a   Lastras Martinez A ^a   Lastras Martinez L F ^a  

^a INSTITUTO DE INVESTIGACIÓN EN COMUNICACIÓN ÓPTICA   (Mexico)

Author keywords

Control systems; Dielectric function; Ellipsometers; Optical properties of thin films

Indexed keywords

EID: 34347392651     PISSN: 0035001X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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