Dual-stage piezoelectric nano-positioner utilizing a range-extended optical fiber Fabry-Perot interferometer

IEEE/ASME Transactions on Mechatronics

Volumn 12, Issue 3, 2007, Pages 291-298

  Hung, Shao Kang ^a   Hwu, En Te ^a   Chen, Mei Yung ^b   Fu, Li Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

Adaptive control; Interferometry; Modulation; Nanopositioning; Optical fiber

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; MODULATION; OPTICAL FIBERS; PIEZOELECTRIC ACTUATORS; PROPORTIONAL CONTROL SYSTEMS;

DUAL-STAGE PIEZOELECTRIC NANO-POSITIONER; HIGH-ORDER HARMONIC INFORMATION;

FABRY-PEROT INTERFEROMETERS;

EID: 34347375514     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2007.897264     Document Type: Article

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