Piezoelectric-resonance effect in a radio-frequency-driven ferroelectric plasma source

IEEE Transactions on Plasma Science

Volumn 35, Issue 3, 2007, Pages 578-581

  Kemp, Mark A ^a   Kovaleski, Scott D ^a  

^a UNIVERSITY OF MISSOURI   (United States)

Author keywords

Ferroelectricity; Piezoelectricity; Plasma sources

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC FIELD EFFECTS; FERROELECTRICITY; NATURAL FREQUENCIES; PIEZOELECTRICITY;

APPLIED-VOLTAGE FREQUENCIES; RADIAL MECHANICAL RESONANCE; RADIO-FREQUENCY FERROELECTRIC PLASMA SOURCE;

PLASMA SOURCES;

EID: 34347373062     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.895226     Document Type: Article

References (22)

1. G. Rosenman, D. Shur, Y. E. Krasik, and A. Dunaevsky, "Electron emission from ferroelectrics," J. Appl. Phys., vol. 88, no. 11, pp. 6109-6161, Dec. 2000.
2. E. G. Farr, J. M. Elizondo, J. M. Lehr, and D. E. Ellibee, "Recent measurements of the ferratron: A high-voltage, fast risetime gas switch with a ferroelectric trigger," in Proc. Pulsed Power Plasma Sci., Las Vegas, NV, Jun. 2001, pp. 1770-1773.
3. O. H. Auciello and G. E. McGuire, "Thin film ferroelectric flat panel display devices, and methods for operating and fabricating same," U.S. Patent 5 453 661, Sep. 26, 1995.
4. F. Vollkommer and L. Hitzschke, "Method of operating a discharge lamp with a cold cathode structure having ferroelectric between," U.S. Patent 6 157 145, Dec. 2000.
5. M. A. Kemp and S. D. Kovaleski, "Ferroelectric plasma thruster for microspacecraft propulsion," J. Appl. Phys., vol. 100, no. 1, p. 113 306, Dec. 2006.
6. Y. E. Krasik et al., "Ferroelectric plasma sources and their applications," IEEE Trans. Plasma Sci., vol. 31, no. 1, pp. 49-59, Feb. 2003.
7. D. Shur, G. Rosenman, and Y. E. Krasik, "Surface discharge plasma induced by spontaneous polarization switching," Appl. Phys. Lett. vol. 70, no. 5, pp. 574-576, Feb. 1997.
8. Y. E. Krasik et al., "Electron beam generation in a diode with different ferroelectric cathodes," J. Appl. Phys., vol. 94, no. 8, p. 5158, 2003.
9. S. P. Bugaev and G. A. Mesyats, "Investigation of the pulsed breakdown mechanism at the surface of a dielectric in a vacuum, I. Uniform field," Sov. Phys. Tech. Phys., vol. 12, no. 10, p. 1358, 1968.
10. A. Dunaevsky et al., "Lifetime of ferroelectric cathodes," J. Appl. Phys., vol. 89, no. 8, pp. 4480-4485, Apr. 2001.
11. A. Dunaevsky and N. J. Fisch, "Measuring the plasma density of a ferroelectric plasma source in an expanding plasma," Phys. Plasmas vol. 11, no. 5, pp. 2957-2963, May 2004.
12. K. Teranishi, S. Suzuki, and H. Itoh, "A novel generation method of dielectric barrier discharge and ozone production using a piezoelectric transformer," Jpn. J. Appl. Phys., vol. 43, no. 9B, pp. 6733-6739, Sep. 2004.
13. C. A. Rosen, "Ceramic transformer and wave filters," in Proc. Electron. Compon. Symp., 1957, p. 205.
14. K. Teranishi and H. Itoh, "Absolute measurement of surface potential and discharge power distributions for piezoelectric transformer-based plasma reactor," Jpn. J. Appl. Phys., vol. 44, no. 9B, pp. 7083-7088, Sep. 2005.
15. H. Itoh, K. Teranishi, and S. Suzuki, "Discharge plasmas generated by piezoelectric transformers and their applications," Plasma Sources Sci. Technol., vol. 15, no. 2, pp. S51-S61, May 2006.
16. Physical and Piezoelectric Properties of APCI Materials, PA: American Piezo Ceramics, Inc. [Online]. Available: http:// www.americanpiezo.com/materials/apc_properties.html
17. T. Ikedain Fundamentals of Piezoelectricity. Oxford, U.K.: Oxford Univ. Press, 1990, pp. 83-104. English ed.
18. S. D. Kovaleski, D. Sullivan, and M. A. Kemp, "An RF driven, ferroelectric, atmospheric-pressure plasma source," presented at the 48th Meeting Division Plasma Physics, Philadelphia, PA, Oct. 2006.
19. S. D. Kovaleski, "Ferroelectric emission cathodes for low-power electric propulsion," presented at the 38th AIAA/ASME/SAE/ASEE Joint Propulsion Conf., Indianapolis, IN, 1999, Paper AIAA-2002-4242.
20. Y. Hayashi and E. Hotta, "Material dependence of strong electron emission from Pb(Zr, Ti))O3 ferroelectric cathodes," Jpn. J. Appl. Phys., vol. 42, no. 7A, pp. 4571-4575, Jul. 2003.
21. Y. Hayashi, A. Okino, and E. Hotta, "Analysis of electromagnetic oscillations in dielectric cathode with grid electrodes," J. Appl. Phys., vol. 94, no. 1, pp. 749-755, Jul. 2003.
22. K. Nakamura and Y. Adachi, "Piezoelectric transformers using LiNbO3 single crystals," Electron. Commun. Jpn., vol. 81, no. 7, pp. 1-6, 1998.