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Volumn 11, Issue 5 PART 2, 2004, Pages 2957-2963
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Operation of ferroelectric plasma sources in a gas discharge mode
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON TEMPERATURE;
FERROELECTRIC PLASMA SOURCES (FPS);
GAS DISCHARGE MODES;
NEUTRAL DENSITY;
ELECTRONS;
FERROELECTRIC MATERIALS;
IONIZATION;
LIGHT EMISSION;
PIEZOELECTRIC DEVICES;
PLASMA DENSITY;
POLARIZATION;
PRESSURE EFFECTS;
SPECTROSCOPIC ANALYSIS;
SURFACE DISCHARGES;
PLASMA THEORY;
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EID: 2942573010
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1692162 Document Type: Conference Paper |
Times cited : (8)
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References (24)
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