Formation process of thin palladium membrane on a porous support by the MOCVD method

Kagaku Kogaku Ronbunshu

Volumn 33, Issue 3, 2007, Pages 211-217

  Itoh, Naotsugu ^a   Akiha, Tomomitsu ^a   Sato, Takafumi ^a  

^a UTSUNOMIYA UNIVERSITY   (Japan)

Author keywords

Gas separation; Hydrogen; MOCVD; Palladium membrane

Indexed keywords

DECOMPOSITION; HYDROGEN; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTIMIZATION; SEPARATION; SUBLIMATION;

FORMATION PROCESS; GAS SEPARATION; HYDROGEN PERMEABILITY; ORGANIC SALT;

PALLADIUM COMPOUNDS;

EID: 34250858245     PISSN: 0386216X     EISSN: 13499203     Source Type: Journal    
DOI: 10.1252/kakoronbunshu.33.211     Document Type: Article

References (16)

1. Huang, L., C. S. Chen, Z. D. He, D. K. Peng and G. Y. Meng; "Palladium Membranes Supported on Porous Ceramics Prepared by Chemical Vapor Deposition," Thin Solid Films, 302, 98-101 (1997)
2. 3 Substrates by Metalorganic Chemical Vapor Deposition for Hydrogen Sensing," Thin Solid Films, 345, 217-221 (1999)
3. Itoh, N. and W-C. Xu; "Selective Hydrogenation of Phenol to Cyclohexanone Using Palladium - based Membranes as Catalysts," Appl. Catal.A-Gen, 107, 83-100 (1993)
4. Itoh, N., N. Tomura, I. Tsuji and M. Hongo: "Deposition of Palladium inside Straight Mesopores of Anodic Alumina Tube and its Hydrogen Permeability," Catal. Today, 39, 103-111 (2000)
5. Itoh, N., T. Akiha and T. Sato; "Preparation of Thin Palladium Composite Membrane Tube by a CVD Technique and its Hydrogen Permselectivity, " Catal. Today, 104, 231-237, (2005)
6. Jun, C.-S. and K.-H. Lee; "Palladium and Palladium Alloy Composite Membranes Prepared by Metal-Oganic Chemical Vapor Deposition Method (Cold-wall)," J. Membrane Sci., 176, 121-130 (2000)
7. Kikuchi, E., Y. Nemoto, M. Kajiwara, S. Uemiya and T. Kojima; "Steam Reforming of Methane in Membrane Rectors: Comparison of Electroless - Plating and CVD Membranes and Catalyst Packing Modes," Catal. Today, 56, 75-81 (2000)
8. Keurentjes, J. F. Gielens, H. Tong, C. Rijn and M. Vorstman; "High-Flux Palladium Membranes Based on Microsystem Technology," Ind. Eng. Chem. Res., 43, 4768-1772 (2004)
9. Lu, S.-Y. and Y.-Z. Lin; "Pd-Ag Alloy Films Prepared by Metallorganic Chemical Vapor Deposition Process," Thin Solid Films, 376, 67-72 (2000)
10. McCool, B., G. Xomeritakis and Y. S. Lin; "Composition Control and Hydrogen Permeation Characteristics of Sputter Deposited Palladium-Silver Membranes," J. Membrane Sci., 161, 67-76 (1999)
11. O'Brien, J., R. Hughes and J. Hisek; "Pd/Ag Membranes on Porous Alumina Substrates by Unbalanced Magnetron Sputtering," Surf. Coat. Tech., 142-144, 253-259 (2001)
12. Takahashi, T.; "Study on the Hydrogen Recovery from Cyclohexane by Means of Membrane Reactor (in Japanese)," M.S. Thesis, Tokyo University of Science, Japan (2005)
13. Uemiya, U, T. Matsuda and E. Kikuchi; "Hydrogen Permeable Palladium-Silver Alloy Membrane Supported on Porous Ceramics," J. Membrane Sci., 56, 315 (1991)
14. Xomeritakis, G. and Y. S. Lin; "Fabrication of a Thin Palladium Membrane Supported in a Porous Ceramic Substrate by Chemical Vapor Deposition," J. Membrane Sci., 120, 261-272 (1996)
15. Xomeritakis, G. and Y. S. Lin; "Fabrication of Thin Metallic Membranes by MOCVD and Sputtering," J. Membrane Sci., 133, 217-230 (1997)
16. Yan S.-C., H. Maeda, K. Kusakabe and S. Morooka; "Thin Palladium Membrane Formed in Support Pores by Metal-Organic Chemical Vapor Deposition Method and Application to Hydrogen Separation," Ind. Eng. Chem. Res., 33, 616-622 (1994)