Fabrication of Yb3+:Er3+ co-doped Al2O3 ridge waveguides by the dry etching

Optical Engineering

Volumn 46, Issue 4, 2007, Pages

  Song, Qi ^a   Gao, Jin Song ^a   Wang, Xiao Yi ^a   Chen, Hong ^a   Zheng, Xuan Ming ^a   Wang, Tong Tong ^a   Li, Cheng Ren ^b   Song, Chang Lie ^b  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Dry etching; Erbium; Optical amplifiers; Optical gain

Indexed keywords

DRY ETCHING; ERBIUM; FABRICATION; OPTICAL GAIN; PHOTOLUMINESCENCE; PLASMA ETCHING; YTTERBIUM;

PHOTOLUMINESCENCE SPECTRUM; REACTIVE PLASMA ETCHING;

WAVEGUIDES;

EID: 34250778405     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2721529     Document Type: Article

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