Phase-contrast microscopy by in-line phase-shifting digital holography: Shape measurement of a titanium pattern with nanometer axial resolution

Optical Engineering

Volumn 46, Issue 4, 2007, Pages

  Kang, Jeon Woong ^a   Hong, Chung Ki ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Digital holography; Metrology; Phase contrast imaging

Indexed keywords

IMAGE RECONSTRUCTION; MEASUREMENTS; THREE DIMENSIONAL; TITANIUM;

DIGITAL HOLOGRAPHY; PHASE-CONTRAST IMAGING; PHASE-SHIFTING METHOD;

HOLOGRAPHY;

EID: 34250776084     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2731317     Document Type: Article

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