Characterization of ZnO-based FBAR devices for RF applications

ICMMT 2000 - 2000 2nd International Conference on Microwave and Millimeter Wave Technology

Volumn , Issue , 2000, Pages 192-195

  Yoon, Giwan ^a   Park, Jae Don ^a   Park, Hee Dae ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Sang Shin Electric Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; DEPOSITION; METALLIC FILMS; MILLIMETER WAVES; ZINC OXIDE;

FILM BULK ACOUSTIC RESONATORS; PREFERRED ORIENTATIONS; RETURN LOSS; RF APPLICATIONS; SPUTTERING DEPOSITION; TWO STEP DEPOSITIONS; ZNO; ZNO FILMS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 34250327802     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMMT.2000.895654     Document Type: Conference Paper

References (10)

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