Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 10, 2005, Pages 4944-4948

  Yang, Wu Bao ^a,b   Fan, Song Hua ^c   Zhang, Gu Ling ^c   Ma, Pei Ning ^a   Zhang, Shou Zhong ^b   Du, Jian ^b  

^a CHINA UNIVERSITY OF PETROLEUM   (China)

^b Prochina Ltd   (China)

^c INSTITUTE OF PHYSICS   (China)

Author keywords

Diamond like carbon films; FTIR; Magnetron sputtering; Raman spectra

Indexed keywords

EID: 27544452171     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)