Transition from tungsten erosion to carbon layer deposition with simultaneous bombardment of tungsten by helium and carbon

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Bizyukov, Ivan ^a   Krieger, Karl ^b  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ION IMPLANTATION; MAGNETRON SPUTTERING; SINGLE CRYSTALS; SURFACE STRUCTURE; TUNGSTEN;

ION ENERGIES; ION FLUX; NONVOLATILE IONS; PROJECTILE TARGET SYSTEM;

ION BOMBARDMENT;

EID: 34249945922     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2727381     Document Type: Article

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