Thermal conductivity and natural cooling rate of excimer-laser annealed Si: A molecular dynamics study

Materials Research Society Symposium Proceedings

Volumn 910, Issue , 2007, Pages 111-116

  Lee, Byoung Min ^a   Seong, Back Seok ^a   Baik, Hong Koo ^b   Munetoh, Shinji ^c   Motooka, Teruaki ^c  

^a Korea Atomic Energy Research Institute   (South Korea)

^b Yonsei University   (South Korea)

^c KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COOLING; EXCIMER LASERS; HEAT TRANSFER; SILICON; THERMAL CONDUCTIVITY;

FINITE-SIZE EFFECTS; NEWTON EQUATIONS; TERSOFF POTENTIAL;

MOLECULAR DYNAMICS;

EID: 34249940873     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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