Characterization & analysis of sub-grain boundaries in sequential lateral solidification processed SOI films

Materials Research Society Symposium Proceedings

Volumn 685, Issue , 2001, Pages 287-292

  Crowder, M A ^a   Limanov, A B ^a   Turk, B A ^a,b   Im, James S ^a  

^a Columbia University ^*  (United States)

^b Department of Electrical Engineering ^*

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; GRAIN BOUNDARIES; MICROSTRUCTURE; PLASTIC DEFORMATION; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SOLIDIFICATION;

LASER FLUENCE; SEQUENTIAL LATERAL SOLIDIFICATION (SLS);

THIN FILMS;

EID: 34249915301     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-685-d11.3.1     Document Type: Conference Paper

References (12)

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