A survey of two-stage focusing systems for nanobeam design

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 8-14

  Merchant, M J ^a   Grime, G W ^a   Kirkby, K J ^a   Webb, R ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Microbeam; Nanobeam; Spherical aberration

Indexed keywords

ABERRATIONS; ELECTRON LENSES; MICROMETERS; PARAMETER ESTIMATION; PRODUCT DESIGN; RAY TRACING; SOFTWARE PACKAGES;

DEMAGNIFICATION; MICROBEAMS; NANOBEAMS; SPHERICAL ABERRATION;

PROBES;

EID: 34249871612     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.272     Document Type: Article

References (6)

1. Dymnikov A.D., Fishkova T.Ya., and Yavor S.Ya. Nucl. Instr. and Meth. 37 (1965) 268
2. Simon A., Jeynes C., Webb R.P., Finnis R., Tabatabaian Z., Sellin P.J., Breese M.B.H., Fellows D.F., van den Broek R., and Gwilliam R.M. Nucl. Instr. and Meth. B 219-220 (2004) 405
3. Grime G.W., and Watt F. Beam Optics of Quadrupole Probe Forming Systems (1984), Adam Hilger Ltd., Bristol
4. Breese M.B.H., Jamieson D.N., and King P.J.C. Materials Analysis Using a Nuclear Microprobe (1996), John Wiley & Sons Inc.
5. Ryan C.G., and Jamieson D.N. Nucl. Instr. and Meth. B 158 1-4 (1999) 97
6. G.W. Grime, TRAX software, 1982.