Kinetic Monte Carlo simulation of InAs quantum dot growth on nonlithographically patterned substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 1072-1076

  Guo, W ^a   Guico, R S ^a   Xu, J M ^a   Beresford, R ^a  

^a Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EPITAXIAL GROWTH; INDIUM ARSENIDE; KINETIC THEORY; LATTICE MISMATCH; LITHOGRAPHY; MONTE CARLO METHODS;

HETEROEPITAXIAL SUBMONOLAYER; KINETIC MONTE CARLO METHOD; NONLITHOGRAPHICALLY PATTERNED SUBSTRATES;

SEMICONDUCTOR QUANTUM DOTS;

EID: 34249866836     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2731335     Document Type: Article

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