MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1589-1594

  Mehdaoui, A ^a,b   Pisani, M B ^b   Tsamados, D ^b   Casset, F ^a,c   Ancey, P ^a   Ionescu, A M ^b  

^a STMICROELECTRONICS   (France)

^b EPFL   (Switzerland)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; ELECTRODES; FINITE ELEMENT METHOD; MICROFABRICATION; MICROMACHINING; SURFACE MICROMACHINING; TUNING;

ELECTRO-THERMAL DRIVE; FRAGMENTED ELECTRODES; ROTATIONAL EFFECT;

MEMS;

EID: 34249815546     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0350-5     Document Type: Conference Paper

References (5)

1. Dec A, Suyama K (1998) Micromachined electro-mechanically tunable capacitors and their applications to RF IC's. IEEE Trans Microw Theory Tech 46(12):2587-2596
2. Liu Q, Huang QA (2001) Micromachined variable capacitors with laterally positioned suspended plates. Proc SPIE 4601:20-24
3. Pisani MB, et al (2003) Copper/polyimide fabrication process for above-IC integration of high quality factors inductors. Microelectron Eng 73-74:474-479
4. Yoon JB, Nguyen TC (2000) A high Q tunable micromechanical capacitor with movable dielectric for RF Applications. IEDM 00-489
5. Young DJ, Boser BE (1996) A micromachined variable capacitor for monolithic low-noise VCOS. Solid-State Sensor and Actuator Workshop, pp 86-89