Investigation of soot deposition and composition in a radio frequency plasma of benzene

Plasma Chemistry and Plasma Processing

Volumn 27, Issue 3, 2007, Pages 256-266

  Lee, Szetsen ^a   Chen, Hsiu Feng ^a   Peng, Jr Wei ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

Benzene; GC MS; Polyphenyl; Radio frequency plasma; Temperature

Indexed keywords

CARRIER GAS; POLYPHENYLS; RADIO FREQUENCY PLASMA;

DEPOSITION; GAS CHROMATOGRAPHY; MASS SPECTROMETRY; PLASMA APPLICATIONS; POLYCYCLIC AROMATIC HYDROCARBONS; SILICON WAFERS; SOOT; THERMAL EFFECTS;

BENZENE;

EID: 34249751502     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-007-9051-9     Document Type: Article

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